整体式主机：CPU、电源、I/O集中在单机箱，结构紧凑、成本低，适配小型控制系统。
模块式主机：各部件拆分为独立模块，配置灵活易扩展，是中大型PLC的主流结构。
叠装式主机：结合前两者优势，模块靠电缆连接，兼顾灵活性与小巧体积。
基础控制类模块
CPU模块：PLC的运算核心，负责处理信号、执行程序、协调全系统工作。
电源模块：为系统提供稳定供电，部分可同时为输入信号供电，带过压、短路保护功能。
信号处理类模块
数字量模块：处理开关信号，分输入（采集按钮、限位开关信号）和输出（驱动继电器、指示灯）两类。
模拟量模块：处理温度、压力等连续信号，支持0-10V电压、4-20mA电流等标准信号格式。
扩展功能类模块
通信模块：支持以太网、Profibus、Modbus等协议，实现PLC与上位机、其他设备的数据交互。
特殊功能模块：包含高速计数模块、定位模块、温度控制模块等，可完成普通模块无法实现的专用控制需求。
继电器输出：适配交直流负载，带载能力强但响应速度慢，适合低频场景。
晶体管输出：仅支持直流负载，响应速度快寿命长，适配高频脉冲输出场景。
晶闸管输出：专用于交流负载，响应速度介于前两者之间。
Wasco SV120-51L3B-X/2068 Vacuum Switch, 15 Torr, Novellus34-309953-06, 424715
GEMU 610 DN15 2/2-Way Plastic Diaphragm Valve DN15PN6PVDF,106116
VERO 116-010022A POWER SUPPLY MODULE, BIVOLT PK60 A, 398395
30 AMAT 0020-10762 ceramic Bushing
Wasco SV120-51L3B-X/2068 Vacuum Switch, 15 Torr, Novellus34-309953-06, 424716
VERO 116-010022A POWER SUPPLY MODULE, BIVOLT PK60 A, 398396
Lot of 15 SPM PRODUCTS ROA05024 Clamps, 182041
AMAT 0020-18544 STRAP, RF IN MATCH SIDE HDP CVD, 182042
DWYER VISI-FLOAT VFA-42-SSV WATER METER, FLOWMETER, 182044
Lot of 3 Unit Instruments UFC-1000 MFC, 188358
Lot of 3 MRC 1020828 FIXTURE HIGH VOLTAGE, WIRE, 182049
Lot of 3 Unit Instruments UFC-1000 MFC, Gas Argon, Range 60SCCM, 188359
Lot of 3 Unit Instruments UFC-1000 MFC, 188360
SMC CBL-0167L CABLE 74587-0101, 182050
AMAT 0050-09681 GAS LINE, 164515
Lot of 5 TEL 028-002485-1 FITTING,FLANGED 34 SEAL, 182053
AMAT 0050-36836 GAS LINE, 164517
DWYER 3003MR-TP PHOTOHELIC DIFFERENTIAL PRESSURE SWITCH/GAUGE,25 PSIG , 164518
ZYGO PIEZO INTERFACE MODULE 291-00184-01, 39400
ZYGO PIEZO INTERFACE MODULE 291-00184-01, 39401
SEMITHE
VARIAN M860153701 IT SENSOR, 188376
AMAT 0991-00026 connector unit FS-RO
ZYGO PIEZO INTERFACE MODULE 291-00184-01, 39402
KEYENCE FU-95 FIBER SENSOR, LIQUID LEVEL DETECTION, 164525
2 Tokyo Electron TEL CT018-001039-1 DRAWERS SLIDES,018-001039-1, 164531
AMAT 0100-09099 Chamber Interconnect Board, PCB, 0110-09099,811-14951R, 133855
Kalrez AS-568A O-Ring K#114, Compound 4079, 9114-SC644,164532
AMAT 0680-01353 CB MAG 3P, 240VAC, 20A, , 126648
2 AMAT 0021-08671 Shell Maglev Sensor Mod
Oriental Motor 3RK15RGK-A2 Speed Control Motor, 15W, 100V,50/60Hz, 126650
2 SMC SYJ3220-6MZD-M3 SOLENOID VALVE,12V, TPM LID UP/DOWN,188380
AMAT 0270-20152 TOOL CAL 101 LIFT TO ROBOT, 158398
AMAT 3870-90300 Valve, Air Pilot, 5 Port, SMC VFA5120-03,126673
AMAT 3300-90283 FITTING CONN QUICK 60 SERIES 1/4, 126654
SIGNET 40-8007B TUBE,GAS FEED, 164549
3 INFICON 211-098 UL1000 KF25 FILTER, 188389
Cover, Plate, 20920-01-52, 188397
AMAT 0021-26848 Rev.E1, 11168200, Screen Holder Lower.417915
AMAT 0090-02137 Rev.002, Assembly, XFMR, Motorized Source.417922
Superior Electric M061-LS08 Stepping Motor 1.25 VDC, 3.8 AMPS,103933
Superior Electric M061-LS08 Stepping Motor 1.25 VDC, 3.8 AMPS,103935
Superior Electric M061-LS08 Stepping Motor 1.25 VDC, 3.8 AMPS,103934
AMAT 0150-04602 Cable Assy, E84 I/F Host Side, Wafer Loader,417881
AMAT 0020-81226 SLEEVE, OVEN NOZZLE, 103940
AMAT 3400-01503 HOSE ASSY FLEX TFE/SST 5/16IDX136L 3/8T,111985
LAM 839-032968-001-A GAS LINE STRAIGHT SECT. NW40, 320 MM,164553
AMAT 3060-00230 BEARING (LUBRCTD 0190-11213), 103946
AMAT 3060-00232 BEARING ( TO 0190-11212), 103947
AMAT 0040-41949 STAND OFF, 111989
CHEMRAZ 9033-SS520 Oring, AS-568A-033 CPD 520, 175727
2 Varian 8104230931 Gate Roller Housing, 188401
LAM 839-032968-001-A GAS LINE STRAIGHT SECT. NW40, 320 MM,164561
LAM 839-032968-001-A GAS LINE STRAIGHT SECT. NW40, 320 MM,164562
AMAT 0020-04350 BRACKET, SENSOR, SHUTTLE POSITION, 192733
AMAT 0200-00340 BUSHING, UPR SHIELD INS, S-IMP CERAMIC REV .P1,138078
LOT OF 4 AMAT 0020-22511 RETAIN BUTTON, 101 PEDESTAL 10-24,155344
AMAT 0040-23193 COVER, 111966
AMAT 0150-10328 CABLE ASSEMBLY I/O PWR. DIST., 175732
AMAT 0140-09166 Harness Assy Dryvac Pump, Vacuum, 138079
AMAT 0140-70093, Cable Assembly, B DryVac Pump Interface,111967
SWAGELOK 1/4" Stainless Steel 3-Way Full Flow Ball ValveSS-42XS4, 192736
AMAT 0150-10328 CABLE ASSEMBLY I/O PWR. DIST., 175734
AMAT 3870-02460 VALVE KIT 3WAY SOL NC/NO 1/4SWAGELOK EBA,111968
2 EGHN.032 GAS FEED TUBE, 192737
2 PILLAR FITTING S-MEW4-N2B FITTING, COUPLING, 811-17127,148933
SMC CD Cylinder, Compact, 138080
AMAT 0140-00058 Harness Assembly, Door Interlock Switch,175699
AMAT 0140-70026 HARNESS, ASSEMBLY PARTICLE REDUCTION VALVE,106144
CANON BN9-7005-080 FILTER, OPTICAL, ND, BN9-7005-080-021,192741
AMAT 0050-09057 Tube Weldment Cap Man, 175744
2 Bracket, Mount, 250081, 100333
AMAT 0050-09057 Tube Weldment Cap Man, 175745
SWAGELOK SS-2P4T4 Valve, 1/8 in. FNPT, 1.2 Cv, 148936
AMAT 0050-05256 GAS FEED 5RA, WALL, 300MM, DPS, 148937
6 AMAT 0690-01566 CLAMP FLG DBL-CLAW NW63,80,100 AL M8-HEX,155352
VACUUM FLANGE 678912-03 HOSE, KF50 PORT, 12", 108296, 175747
SMC MXS12-50-X202 ADJUSTER AIR SLIDER TABLE CYLINDER, 148938
AMAT 0600-01099 FAN106 CFM 115VAC/60HZ 4.68 X 4.68 X 1.5,161156
H-SQUARE NOST WAND 9CRN2372 HANDLE, 164571
AMAT 0040-94215 BLOCK, SLIDER, 161157
Lot of 3 Disco EAUA0014100 DI Sensor 7, ETH-BG-68-A, 192744
AMAT 0680-01803 CBSUPPL PROTECT CUR-LIMIT 1P 240VAC 5A D,145463
AMAT 0100-00061 Limit Detector, Circuit Board, PWB Assembly,PCB, 192745
AMAT 0190-07351 COVER, FILLER PLATE, LOWER ADO COVER, 161159
LOT OF 11 W.M.BERG B1-9 BEARING .25X.625, 22-00072-00,164575
AMAT 0242-00051, WXZ Centura-Wet CL, 0020-10886, 3700-01887Oring 13.820, 399204
RFL Industries, 72A Temperature Controller, 115A, 115V/230V,114273
2 TOKYO ELECTRON TEL M10-400151-1 VARICON DRIVE GEAR (B),M10-400151-X, 148980
VARIAN 2000020 FIBER OPTICS CABLE, 148981
EATON 6500153 SENSOR, 148982
LOT OF 6 EATON 1709750 BEARING, 148983
AXCELIS 0295-0082-0001 APERTURE, EXIT, ELECTROSTATIC , 164580
RPM MICRO 106654A08 RECTIFIER ASSY, SPC12RS 9220, 164581
TEXAS SEAL SUPPLY 064837 WHITE SILICONE O-RING 64837, 164582
QZK 37016 QZAK LINEAR SHAFT, ROD, 811-19893,1014658, 164583
AMAT 0020-09955 LEVELING PLATE, 110983
ASML 4022.431.33271 CYBEQ SSAR BELTS 4022-431-33271, 164584
2 Tokyo Electron TEL ME4-144160-A SLEEVE, E4-144160-A,10219,164585
AMAT 3300-05430 BT12-12FN-1, Flaretek Tee Adapter, 3/4" Flaretekx 3/4", 126732
LAM 853-009538-001 CABLE, REMOTE CRT ADAPTER, 190907
AMAT 0660-01533 Card Controller Burst Firing ADJ, 126733
Lot of 6 Precision Dynamics A3113 Solenoid Valve, 190909
AMAT 0020-34488 ADAPTOR, BULKHEAD, 5/8"-18 TO 3/4"-20,164589
Lot of 7 Precision Dynamics A3113 Solenoid Valve, 190910
AMAT 0020-08142, Plate Exhaust, 110988
LOT OF 3 KALREZ AS-568A O-RING K#10247, COMPOUND: 4079, 2-10247,133955
Fujikin FP-71-6.35 Valve, Air Actuated, 133976
Fujikin FP-71-6.35 Valve, Air Actuated, 133977
AMAT 0150-00722 CABLE ASSY ADAPTER FOR HEADLAND TO PROTEUS,107719
SMC CRB80-180-XJN AMAT 0520-90013 ROTARY ACTUATOR MOTOR,112011
Mitsubishi S-N65 Magnetic Contactor, 850-08678, 133974
AMAT 4020-90004 FILTER TEE TYPE 60 MICRON, 175775
Patlite SEF-N Signal Tower, 175776
3 Creativity 17HS4401 Stepper Motor, 172052
2 AMAT 0680-01849 CB SUPPL PROTEC CUR-LIMIT 1P 240VAC,126742
2 Novellus 15-164339-00 Insulator RF Conductor Coil
2 AMAT 0680-01851 CBSUPPL PROTEC CUR-LIMIT 1P 240VAC 16A D,126743
2 SUNON KD1212PMB1-6A AMAT 0600-01145 12V DC FAN BRUSHLESS BALLBEARING, 126744
YAMATAKE-HONEYWELL FE3-FA6 PHOTOSENSOR, 12-24V,FE3 FIBER OPTIC,188432
2 SMC CDU16-25D AIR CYLINDER, 126746
LOT OF 50 VALUE PLASTICS LE32-6 MALE TO FEMALE LUERELBOW-POLYPROPYLENE, 188434
HITACHI 3-848367-A GV1 PM Kit (For X24), 188435
2 SMC CDU16-25D AIR CYLINDER, 126747
SMC CDJ2 CYLINDER, 190924
AMAT 0021-14771 Panel Shield, PCB Chamber PCB Elect, Box,145498
LAM 715-441775-001 BLK, MTG, THERMOSTAT, 190928
3 CUSTOM EYE IP-10208 LARGE, CAP SHIELD, 811-18268, 188439
Lot of 2 Unit Instruments UFC-1100 MFC, Gas BCL3, Range 500SCCM, 186305
Lot of 3 Unit Instruments UFC-1100 MFC, 186306
Novellus 15-281711-00 Fitting, Tee, Vac 3/8 Comp To KF,450891
Novellus 03-134727-00 PCB Board
VARIAN 108181119 CABLE ASSEMBLY, B-83802-001, 50 PIN RIBBONCABLE-B, 145485
LOT OF 3 WJ 088333-000 FILTER, WITH DRAIN, 1/8 NPT, TRANSPARENTBOWL, 164611
Black Box A1AZ18331 ABC Switch, Box, 133999
AMAT 3700-01284 O-RING ID .9234 CSD .139 SILICONE 70 DURO,134000
Mitsubishi TH-N60TA-67A Thermal Overload Relay, TH-N60TA,850-08642, 134001
Leybold 72142073 Dryvac Remote Indicator System, 164621
Leybold 72142073 Dryvac Remote Indicator System, 164622
KALREZ AS-568A O-RING K# 130 COMPOUND: 4079, AS-568A-130, 2-130,126761
EBM G2E140-AC13-42 Centrifugal Fan, Fan Blower 115V 200W 50Hz,164591
EBM G2E140-AC13-42 Centrifugal Fan, Fan Blower 115V 200W 50Hz,164592
Westinghouse EHD3100 Series C Industrial Circuit Breaker,100AMPS,480 VAC,3 POLE
SMC CD ASSY, INDEX CYLINDER ,CD-F79L,164597
KEYENCE LZ-A150 Sensor Amplifier Photoelectric Switch sw1000,5138951, 134006
MW MEAN WELL PS-280-13.5 POWER SUPPLY, 117731
2 MILLIPORE WGGL40S01 WAFERGARD-40 CARTRIDGE FILTER 0.2UM,108327, 164598
KALREZ AS-568A O-RING K#201, COMPOUND: 4079, 2-201, AS-568A-201,134023
KALREZ AS568-328 O-RING COMPOUND:8375UP, K#328, 2-328 VACUUMPORT, 134025
NT International D70-F-02-LP Loop Power Process Indicator, 1-5LPM, 100631
LOT OF 5 CHEMRAZ 5641-0531-SC520 CPD 520 END EFFECTOR WAFER PAD,134024
Integrated Power Designsuad Output Power Suppy,112050
NT International D70-F-02-LP Loop Power Process Indicator, 1-5LPM, 100632
NT International D70-F-02-LP Loop Power Process Indicator, 1-5LPM, 100633
2 ONTRAK 13-8092-432 GUIDES, FLIPPER,, 164604
2 HUMPHREY VA250A AIR VALVE,3200393,VA250AVAI,9EAH5166,NV10,E1180103, 164608
2 AIRPOT 5160P105X PRECISION AIR DASHPOT,CYLINDER,LOADFINGER,3200057, 164610
BOC Edwards D37272000 Dry Pump Keypad Display Module, 424721
BOC Edwards D37272000 Dry Pump Keypad Display Module, 424722
CHEMRAZ 9024-SC520 O-RING AS-568A-024 CPD 520, 2-024, 134013
Thermolyne Type 10100 stirring hot plate SP10105B
KALREZ AS-568A O-RING K#012, COMPOUND: 8101UP, 78-0121,134015
Converged Tooling Architecture SKX-CSX-FPGA PCB, 640-0107,J76464-100, 175807
BOC Edwards D37272000 Dry Pump Keypad Display Module, 424723
AMAT 0190-04978 Water Manifold Hose, 106153
MILLIPORE WG2F06WC1 IN-LINE GAS FILTER 1/4" O-RING SEAL,134017
AMAT 0050-09057 Tube Weldment Cap Man, 175812
2 AMAT 0010-76082 ASSY HINGE REMOVABLE, 175815
AMAT 0150-02866 CABLE ASSY PUMP SIGNAL 10 FT ANNEA
MCDOWELL 2-131-KA4079 O-Ring, 062716, KALREZ, 175816
AMAT 0040-01009 GAS MODULE TUBE, TUBE WLDT
TRANSLOGIC 78366001 SHAFT, DRIVE WHEEL, 470A0016, 188453
PACKLESS HXR-0077 REFRIGERANT HEAT EXCHANGER, 175819
PACKLESS HXR-0077 REFRIGERANT HEAT EXCHANGER, 175820
AMAT 0100-00694 PCB, Assy, Chamber, 111005
AMAT 0040-01009 GAS MODULE TUBE, TUBE WLDT, 399209
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