整体式主机：CPU、电源、I/O集中在单机箱，结构紧凑、成本低，适配小型控制系统。
模块式主机：各部件拆分为独立模块，配置灵活易扩展，是中大型PLC的主流结构。
叠装式主机：结合前两者优势，模块靠电缆连接，兼顾灵活性与小巧体积。
基础控制类模块
CPU模块：PLC的运算核心，负责处理信号、执行程序、协调全系统工作。
电源模块：为系统提供稳定供电，部分可同时为输入信号供电，带过压、短路保护功能。
信号处理类模块
数字量模块：处理开关信号，分输入（采集按钮、限位开关信号）和输出（驱动继电器、指示灯）两类。
模拟量模块：处理温度、压力等连续信号，支持0-10V电压、4-20mA电流等标准信号格式。
扩展功能类模块
通信模块：支持以太网、Profibus、Modbus等协议，实现PLC与上位机、其他设备的数据交互。
特殊功能模块：包含高速计数模块、定位模块、温度控制模块等，可完成普通模块无法实现的专用控制需求。
继电器输出：适配交直流负载，带载能力强但响应速度慢，适合低频场景。
晶体管输出：仅支持直流负载，响应速度快寿命长，适配高频脉冲输出场景。
晶闸管输出：专用于交流负载，响应速度介于前两者之间。
AMAT 0620-02886 CABLE OPTO INT DARK-ON CE96, 155881
Novellus 34-140181-00, UE Precision Sensors EPV48W-16, 2 elementpressure switch
Millipore WGFG40P01 Wafergard PF-40 Filter Unit, 0.2um,155862
OMEGA PSW-801 125/250VAC SWITCH VACUUM 4-30, ZT70961-23,5404720, 130408
King Slide U661-818APZZ0AE Slide Rail Assy, R0885-F0020-03,179371
AMAT 0010-00028 POWER SUPPLY DC MONITOR 15V LAMBDA 9501R08181401754
Wasco SV128-31W2A-X/6690 Vacuum Switch, LAM 853-0Torr, 1A, 127036
Dwyer A3005 Series 3000 Photohelic Pressure Switch/Gauge 24V,107914
LOT OF 2 AMAT 3500-01120 NUT FLANGE 7/8-10 SST FOR LEAD SCREW,146006
AMAT 0150-12166 Harness Assy, Shelf C PDD J2 To FI, 164997
AMAT 0240-75106 Kit, Centura Chamber Through the Floor VacumnConn, 158987
BRACKET-CRT PWB-CONTROL (IIIA), 16-117980C02, 04-119362A01,184870
2 FSI 301642-001 SENSOR, BIMBA D-7000-A-96, 184880
Pittman GM9413J820 Motor, 24VDC, 500CPR, 19.7:1 Ration,179397
LAMBDA EWS25-5 POWER SUPPLY DC24V 1.2A, 191255
FSI 232482-002 Switch SPDT N/O PB ILLUM YEL, 176335
AMAT 0020-20558 Blank Slit Valve, 138865
2 AMAT 0040-13270 BLANKOFF, AC RECEPTACLE , CHAMBER FAC AC,182360
AMAT 0020-33061 Clamp Ring Extension Flag P5000, 418167
Tokyo Electron TEL 385-335707-4 Dip Dev Vac Piping,4012
LAM 853-034431-001 Assy, Harness, SEC HTD WDO, 9600, 188760
SURVIVAIR 962900 APR ADAPTOR KIT, 962910, 149584
Huttinger D40-1471 PCB Integrator Threshold Switch, PCB,188768
Huttinger D40-1471 PCB Integrator Threshold Switch, PCB,188769
Huttinger D40-1471 PCB Integrator Threshold Switch, PCB,188770
FMI 0202-0088 Valve, Pneu Vac Generator Supply, AMAT 032-0561,VGS V1, 188771
Varian 0400001841 Stepping Motor, Oriental Motor UPX534M-A-C19,191294
AMAT 0020-23043 Upper Shield, Tin, 8" Wafer, 146077
DEL-W-SC1V6 PCB Slave Wed Loader, SC 1v6, CTR5 9546, 134835
PROTEUS INDUSTRIES 150CT FLUID FLOW SWITCH, 149561
HITACHI HIGH TECNOLOGIES 3-830027-A , ASHER REFLECTOR- LEGACY,114865
AMAT 0150-70137 Assy Cable System Video, 188782
LAM 683-270956-040 Cable DC Power, 166095
NAIS AFP8502 Motor Driver I/F Terminal 2-Axis type
Copal Electronics PS4-102V-NK Pressure Switch, KBB0Z400,188800
Matsushita BMF6-20-1 AC Magnetic Contactor, Type FC-20,S473D12115, 127169
Oriental Motor UDX5107-G4-2, Super Vexta 5-Phase Driver.419777
AMAT 0150-27311 Cable Assy, 2W Light Swit, 166073
AMAT 0150-27477 Cable Assy, 24VDC To Swi, 166074
LAM 839-296682-001 Weldment N2 Supply Sensor SMPLG, 166078
Tokyo Electron TEL D115267 Shield, Sput - 200mm, SS, 156002
2 AMAT 0021-25432 PIN, WAFER CENTERING, IBC, SC ECP, 172737
Huttinger D40-1471 PCB Integrator Threshold Switch, PCB,188811
AMAT 0021-09131 Door, I/O Slit Valve, 188815
Typw 2423 Senor Cable, 176432
AMAT 0020-82379 Graphite Block, L.C. Beamstop
2 SMC NCDRB1BW30-90S ROTARY ACTUATOR, 182467
GEORG FISCHER 342-62-007 TYPE 304 HDP, CDO, VALVE, Y-CHECK,ASSY, 172752
LOT OF 3 NIBCO 214-24-026 UNION, 1-1/2 SOC,233375221, 172753
ANELVA 1019-15534 POST, LOCATING, 100265496, 182471
APPLIED MATERIALS 0140-21666, HARNESS ASSY, MAPPER/ORIENTER
Turck VB2-0.2/RK 4T-0.3/RK 4.5T-0.2/S 1545 Cable Assy,127218
3 H+S Astrolabe Minibend-14HT Miniband Cable Assembly,103963
AMAT 0020-23043 Upper Shield, Tin, 8" Wafer, PVD, 112280
AMAT 0020-23043 Upper Shield, Tin, 8" Wafer, PVD, 112281
AMAT 0660-00121 Module 4 SGL-ENDED Output For 1794 Anal,Allen-Bradley, 159203
AMAT 0020-23043 Upper Shield, Tin, 8" Wafer, PVD, 112282
AMAT 0020-06832 BRACKET,COUPLING ATTACHMENT, 139134
AMAT 0020-23043 Upper Shield, Tin, 8" Wafer, PVD, 112283
AMAT 0020-23043 Upper Shield, Tin, 8" Wafer, PVD, 112284
AMAT 0020-23043 Upper Shield, Tin, 8" Wafer, PVD, 112285
AMAT 0020-23043 Upper Shield, Tin, 8" Wafer, PVD, 112286
AMAT 0020-23043 Upper Shield, Tin, 8" Wafer, PVD, 112287
AMAT 0020-23043 Upper Shield, Tin, 8" Wafer, PVD, 112288
AMAT 0021-00948 Rod, Interlock Lower, 300MM, DTCU, DPS,418218
98 PARKER 2-036-E893-80 O-RING, CHUCK, ADAPTER, 233045043,049103637, 182496
5 PRECISION 1-245 O-RING, 4 3/8 X 1/8, 2-245, 81336948,182497
AMAT 0150-37074 Cable Assy Interlock - LED 2KW HF. RF. Gen,176466
TEL DS1187-170243-11 SOFT BACKFILL INJECTOR, NODE,1187-170243-11, 186874
TEL 027-000093-1 O-RING AS568-264, 2-264, 186875
48 MKS HPS 100312701 Seal, Center Ring Assembly, NW16, S/V,101058
MKS 247C 4-Channel Readout, Power Supply, 101060
Leybold Inficon 757-500-G1 Deposition Process Controller,101061
14 NORGREN 18-013-252 GAUGE, BACK CONNECTION , 160PSI, 1/8MNPT,188881
AMAT 0150-37074 Cable Assy Interlock - LED 2KW HF. RF. Gen,188886
Millipore WGFG40P01 Wafergard Filter Element, 0.2um, Cartridgefilter, 110729
2 AMAT 0140-40402 HARN ASSY, ADAPTER, 10 TORR MANOMETER,176502
Millipore WGFG40P01 Wafergard Filter Element, 0.2um, Cartridgefilter, 112300
Sola 83-24-260-03 Power Supply, S2, 24VDC, 47-63Hz, 127282
AMAT 0100-38008 Assy, PCB Microwave Interlock
Prairie Electric ETE0327 ALTA-X RTD 1 Assembly, 166182
Varian 971-0018 UHV-24/UHV-24p Ionization Gauge, ,172657
ORIENTAL MOTOR PH268-21 VEXTA 2-PHASE STEPPING MOTOR, 176485
ORIENTAL MOTOR PH268-21 VEXTA 2-PHASE STEPPING MOTOR, 176486
ORIENTAL MOTOR PH268-21 VEXTA 2-PHASE STEPPING MOTOR, 176487
AMAT 0240-75106 CENTURA CHAMBER THROUGH THE FLOOR VACUUM CONN,156151
SCHLUMBERGER A3165550019 E PHASING CABLE, 176553
AMAT 0200-09215 Ring, Pedestal, Quartz, 5", Metal Etch C,401777
Millipore WGFG40P01 Wafergard Filter Element, 0.2um, 183046
Duniway DST-531 Thermocouple Gauge Tube, 191414
AMAT 0140-76079 CH A PCII INTERCONNECT HARNESS, 176591
AMAT 0270-20066 JIG ROBOT LOWER DRIVE REMOVAL, 161664
SWAGELOK NXT-DRP41AFEFE-C DIAPHRAGM VALVE, 161728
Melles Griot 05LPL 235 Laser Power Supply, 100 VAC, 2450V, DC,6.5mA, 415611
RF POWER PRODUCTS 7921302010 AMAT 0900-01053 FLTR LOW-PASS BOX,142327
RF POWER PRODUCTS 7921302010 AMAT 0900-01053 FLTR LOW-PASS BOX,142328
AMAT 0020-23043 Upper Shield, Tin, 8" Wafer, PVD, 112352
FSI 1-W-105 LED Panel Controller, Cable, 188945
AMAT 0020-23043 Upper Shield, Tin, 8" Wafer, PVD, 112353
OMRON E5DC-RX2-617 Digital Temperature Controller, 180844
Burkert 467541 Solenoid Valve 2/2Way, 166257
98 Legris 3166 56 60 Connector, Tube Fitting, 176635
AMAT 0020-24798 Cam, Left Chamber, 139305
Novellus 04-708192-03 Shield, Horizontal Pass Through,191386
AMAT 0140-38139 HARNESS, INTERLOCK SPILL INTERLOCK
Fluoroware 201-74 Valve Repair PTS Kit 1/2" MT, Galtek,127401
Tylan FC-260 Mass Flow Controller PH2 1 SLPM MFC 424356
Tylan FC-260 Mass Flow Controller H2 1 SLM MFC 424357
Genus Assy 13052-00 Rev A Sch 13053-00 Board, 109716
4 AMAT 0021-36606 BUSS BAR GROUND XFMR BOX CENTURA, 191453
4 AMAT 0021-36606 BUSS BAR GROUND XFMR BOX CENTURA, 191454
AMAT 0021-02365 C-Clamp, SACVD, DXZ, Lid, Clamp, 153240
INTEL TC30B CUSTOMR60,PROBECARD,25PIN,USEONEGPROBER,500039381,CA31P, 166286
AMAT 0240-75106 CENTURA CHAMBER THROUGH THE FLOOR VACUUM CONN,161813
AMAT 0150-09057 Cable Assy RF Generator, 153066
FIRE SENTRY S7-2175 CONTROL PANEL, 153067
CHEMRAZ 9030-SC513 O-RING, AS-568A-030 CPD 513, 2-030,130510
Tokyo Flow Meter FC-PC28-TUR Flow Checker Meter, 156275
VERSA LSG-4232-LW027-24VDC ELECTRIC VALVE, LGG-4232-LW027-24VDC,182719
TERADYNE AD202 PCB BOARD ASSY, 192135
TERADYNE MA148 PCB BOARD ASSY, 192137
TERADYNE LD549 PCB BOARD ASSY, 192139
TERADYNE LD549 PCB BOARD ASSY, 192140
AMAT 0150-09087 Cable Power Susceptor Calibration Display B,146432
AMAT 0040-70623 VALVE PNEU BELLOWS N/C 1/2FVCO X 1/2FVCO
AMAT 0150-36817 Cable, 142642
AMAT 673201 Cable, Display Interconnect, 161841
AMAT 0300-09053 PROM ASSY 29A ECHUCK CONTOLLER PCB, 130561
AMAT 0150-09087 Cable Power Susceptor Calibration Display B,146452
LAM 2200919 BALL BEARING #SR543PPD3 W/YVAC3 GR,MIL-B-22191D,169212
AMAT 4020-01043 FILTER, 166327
AMAT 4020-01043 FILTER, 166328
Drtek 2800343 Disk Interface Board, PCB, 2800342, 2800343-1,142657
AMAT 0190-09293 SEAL 15.276 X .139 W BRN BWCVD, 116791
2 AMAT 0020-21069 SLIP-HINGE, MALE, REAR STEP, 173004
AMAT 1341054A CABLE ASSY, 4.5 FT MASTER AND SLAVE CABLE,182751
AMAT 0650-01037 Computer Floppy Disk Drive 1.4MB Internal, SonyMPF520-7, 161889
Fusion 60394 Assy Probe TCP CTSM, 179543
Swagelok Nupro SS-4BK VC-1C Bellows Sealed Actuator Valve,419843
Sumitomo 3874001641 Thermo Sensor, 101768
SPEEDFAM 2805-727003 BACKING, POLISH PAD ASSEMBLY, 124554
SPEEDFAM 2805-727003 BACKING, POLISH PAD ASSEMBLY, 124555
SPEEDFAM 2805-727003 BACKING, POLISH PAD ASSEMBLY, 124556
SPEEDFAM 2805-727003 BACKING, POLISH PAD ASSEMBLY, 124557
AMAT 1190-01003 regulator, air pressure 0-30 PSIG blank
BOC Edwards PV25PKS Angled Vacuum Valve, C41315000, 24V, 0.25A,7 Bar, 135402
2 AMAT 1010-90025 LIGHT, PILOT INDICATOR WHITE, 800T-Q24,146540
HEDLAND H624-010-R BADGER METER, 1/2 NPT, 1-10 GPM, EZ VIEW,H20, 130642
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