sla5800 series: digital thermal mass flow meter/flow controller,elastomer seals
brooks sla5800 series elastomer sealed digital thermal mass flowmeasurement and control products offer unparalleled flexibility andperformance. they offer faster response, better accuracy andimproved control over traditional analog devices. industry leadingrepeatability ensures a stable process even under changingconditions. self diagnostics and alarms eliminate downtime. thesedevices are globally approved for use in a variety of serviceareas. 流量范围：3sccm-30slpm 精度：1%rate or 0.7% rate 0.2%fs 大压力：300bar 4500psig 温度：65℃ 150f 信号：0-5v4-20ma rs-485 |