MIDAS-K-B2H气体侦测器探头

MIDAS-E-BR2 溴 (Br2)、化氯 (ClO2) 0.036-0.4 ppm

MIDAS-E-CFX 二氟 (CH2F2)、六氟丁二烯 (F6)**、氟 (CH3F)**、八氟环戊烯 (C5F8)**,16-240 ppm 3-40 ppm 8-120 ppm 3-40 ppm

MIDAS-E-CFH 六氟丁二烯 (F6)** 7.2-80 ppm

MIDAS-E-COX 一氧化碳 (CO) 9- ppm

MIDAS-E-HAL 氯 (Cl2) 氟 (F2)" 0.18-2 ppm 0.36-4 ppm

MIDAS-E-B2H 乙 (B2H6) 0.036-0.4 ppm

MIDAS-E-H2X (H2) 90-0 ppm

MIDAS-E-HCN (HCN) 1.8-20 ppm

MIDAS-E-H2S 硫化氢 (H2S) 3.6-40 ppm

MIDAS-E-LEL (H2)、 (CH4) 6.5- LEL

MIDAS-E-NOX 一氧化氮 (NO) 9- ppm

MIDAS-E-NO2 化氮 (NO2) 1.05-12 ppm

MIDAS-E-O2X 氧气 (O2) 0.2-25 v/v

MIDAS-E-O3X 臭氧 (O3) 0.036-0.4 ppm

MIDAS-E-O3H 臭氧 (O3) 高浓度) 0.036-0.7 ppm

MIDAS-E-PH3 磷化氢 (PH3) 110-1200 ppb

MIDAS-E-SHL (SiH4)（低浓度）0.18-2 ppm

MIDAS-E-SHX (SiH4)、乙 (Si2H6) 1.8-20 ppm

MIDAS-E-SO2 (SO2) 0.7-8 ppm

MIDAS-E-TEO TEOS 3.6-40 ppm

MIDAS-E-XCF 二氟 (CH2F2)、六氟丁二烯 (F6)**、八氟环戊烯 (C5F8)** 0-40 ppm 0-240ppm 0-40 ppm

MIDAS-I-CO2 化碳红外盒 0.15-5.0, 0.15-0,2 v/v

MIDAS-I-N2O 一氧化二氮红外盒 -0 ppm

MIDAS-E-XHF 三氟化氮 (NF3)*、氟 (CH3F)** 0-40ppm 0-120ppm

MIDAS-K-NH3 氨 (NH3) 9- ppm

MIDAS-K-ASH 氢 (AsH3)、锗烷 (GeH4) 18-200 ppb 70-800 ppb

MIDAS-K-HCL 三氯化硼 (BCl3)、 (H2Cl2Si)、溴化氢 (HBr)、氯化氢 (HCl) 0.72-8ppm

MIDAS-K-HFU (HF)、六氟化钨 (WF6) 0.42-2 ppm 0.22-2 ppm

MIDAS-K-HFX 三 (BF3)、 (HF)、三氟化氮 (NF3)*、六氟化钨 (WF6) 0.72-8 ppm 1.05-12ppm 3.6-40 ppm 1.05-12 ppm

MIDAS-K-HFL 三 (BF3)、 HF（低浓度）、六氟化钨 (WF6)（低浓度）*** 0.18-2 ppm