美国原装进口BROOKS 5853E气体质量流量控制器 5863E气体质量流量计

供应商
郑州思舜电子科技有限公司
认证
报价
5000.00元每台
品牌
BROOKS
型号
5853E 5863E
产地
美国
手机号
15800669177
联系人
李经理
所在地
河南省郑州市高新技术产业开发区瑞达路樱花街高真大厦610室
更新时间
2021-12-27 11:52

详细介绍

settling time

less than 3seconds to within 2% full scale of final value for a0- command change. 

repeatability 0.25% ofrate 

sensitivity to mounting attitude ±0.5% fullscale maximum deviation from specified accuracyafter re-zeroing 

temperature sensitivity zero: lessthan ±0.075% f.s. per degree c span: lessthan ±1.0% f.s. shift from original calibration over 50°fto 122°f range (10°c to 50°c) pressure sensitivity (model 5853e) ±0.03% perpsi up to 200 psig (n2) 

ratings: operating pressure 1500 psig(100 bar) maximum 

differential pressure (model 5853e) standard:high differential valve 30 to 290 psid optional:low differential valve 7.5 to 30 psid (<500 slpm)11.8 to 30psid (>500 slpm)

temperature ambient/gas 41°f to149°f (5°c to 65°c) 

leak integrity, outboard 1 x10-9atm cc/sec.helium (excluding permeation)

materials of construction wettedparts — 316 stainless steel with viton®fluoroelastomers,buna-n or ptfe/kalrez®

BROOKS流量计,控制器,5853E,5863E,

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