HaloVac 125 halocarbon Vacuum Pump Fluids

halovac®精密真空泵油是专为精密真空泵应用中所需的低蒸汽压和粘度特性而设计的氟化润滑剂。 halovac® oils aredesigned for use as nonflammable and nonreactive lubricants incontinuous operations that involve oxidizing environments, orhazardous chemicals. halovac® oils are routinely used inapplications ranging from plasma etching and chemical vapordeposition in semiconductor fabrication to the vacuums usedreactive gas handling and electron microscopy. these oilssignificantly reduce the safety and exposure risks associated withthe routine operation, maintenance, and waste disposal common inthese applications.

key performance characteristics:

chemically inert

non-toxic

no sludge-formation

nonflammable (no flash or fire point)

high thermal stability

exceptional resistance to lewis-acids

low vapor pressure

underwent no weight loss

did not experience a reduction in viscosity

had no change in ph, and no increase in acidity

encapsulated volatile organic compound

emitted no discernable fumes or acidic odors