5860e: analog thermal mass flow meter, 3 - 30,000 sccm, elastomerseals
the brooks model 5860e elastomer sealed analog mass flow meteraccurately measures gas flows of 3 - 30,000 sccm (nitrogen).brooks’ extremely stable flow sensor provides reliable, repeatableand accurate flow measurement even under varying processconditions. it eliminates the need for continuous monitoring andreadjustment of gas pressures to provide a stable gasflow. 流量范围：3sccm-30slpm 精度：1%fs 大压力：100bar 1500psig 温度：65℃ 150f 信号：0-5v |