5851e: analog thermal mass flow controller, 10 - 100 slpm,elastomer seals
the brooks model 5851e elastomer sealed analog mass flow controlleraccurately measures and controls gas flows of 10 - 100 slpm(nitrogen). brooks’ extremely stable flow sensor provides reliable,repeatable and accurate flow measurement even under varying processconditions. it eliminates the need for continuous monitoring andreadjustment of gas pressures 流量范围：10slpm-100slpm 精度：1% fs 最大压力：100bar 1500psig 温度：65℃ 150f 信号：0-5v |