5861e: analog thermal mass flow meter, 10 - 100 slpm, elastomerseals
the brooks model 5861e elastomer sealed analog mass flow meteraccurately measures gas flows of 10 - 100 slpm (nitrogen). brooks’extremely stable flow sensor provides reliable, repeatable andaccurate flow measurement even under varying process conditions. iteliminates the need for continuous monitoring and readjustment ofgas pressures to provide a stable gas flow.
流量范围：10slpm-100slpm 精度：1%fs 最大压力：100bar 1500psig 温度：65℃ 150f 信号：0-5v
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